VOIR®SCU ozone oxidation module, helping to enhance the efficiency of semiconductor cleaning processes.

Release time：2022-12-14

2022.11.10 Shenzhen Voir® SCU has launched an ozone‑generation module, helping semiconductor manufacturers enhance process filtration efficiency and address supply-chain challenges for semiconductor material components. Traditional semiconductor equipment cleaning relies on chemical agents, which are not only environmentally unfriendly and hazardous but also entail high usage and maintenance costs.
In semiconductor and microelectronics manufacturing, high-precision filtration is essential to ensure process purity and enhance performance. While filtering and cleaning wafer‑processing equipment, safety and environmental protection must also be prioritized. The inherent physical and chemical properties of fluoropolymers make them an ideal material for filtration.

VOIR®SCU ozone‑generation module: a bubble‑free ozonated water solution that helps semiconductor manufacturers enhance process efficiency.
1. Equipped with a built-in folded microporous fluoropolymer (e-PTFE) filter core, it effectively removes particulates from ozone gas, produces bubble-free ozone water of high purity, and ensures that the equipment components remain free from contaminant ingress during the cleaning process.
2. The module is constructed entirely from fluoropolymer materials: the pleated filter membrane utilizes a proprietary ultra-thin e-PTFE (expanded polytetrafluoroethylene), the outer coating features an ultra-thin PTFE‑based fluorinated woven layer, and the housing is made of PFA fluoropolymer.
3. Ozone gas is dissolved in ultrapure water to produce ozonated water; by controlling the concentration and flow rate of the ozonated water to maintain consistency, a more stable performance is achieved.
4. The ozone filtration module, based on e-PTFE microporous material technology, can achieve higher inlet water pressure, thereby increasing ozone concentration and purity and enhancing production efficiency.
5. Addressing the supply chain challenges of fluoropolymer filters.
6. Voir boasts many years of experience in the research, development, and application of fluoropolymer films.

The ozonation module for fluoropolymers is typically used in:
1. Silicon wafer production.
2. Logic circuit and memory manufacturing.
3. Production of LED, OLED, and QOLED flat-panel displays.
4. Fields such as photomask manufacturing.

Voir Semiconductor Materials Components Division (VOIR®SCU)
VOIR®SCU is the materials and components division of Voir Technology, focusing on the semiconductor field. Leveraging fluoropolymer materials and cable assembly transmission solutions, it helps chip manufacturing, packaging, and testing equipment manufacturers deliver reliable signal transmission, while providing PTFE filter membranes, filter cartridge assemblies, and fluorine-based sealing and protection solutions for lithography illumination and filtration/cleaning processes. It has already supplied solution products to numerous semiconductor manufacturers, including leading Asian semiconductor companies.

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